Core Features

Ultra-low water and oxygen environment 

The multi-stage purification system (molecular sieve + catalytic deoxygenation + circulation purification) is adopted, ensuring that the water and oxygen concentration inside the box remains stably below 0.1 ppm for a long time, meeting the requirements for ultra-thin film growth and sensitive material processing. 

Optional real-time water and oxygen analyzer with data recording and alarm functions. 

Multi-station collaborative design 

Supports multi-module integration such as evaporation source, substrate heating, plasma cleaning, and magnetron sputtering (customized as needed). Workstations are isolated by internal transfer chambers to prevent cross-contamination. 

Standard configuration includes 3 to 6 independent workstations (expandable), compatible with glove operation or mechanical arm automated transfer. 

Integrated vacuum coating 

The glove box is seamlessly connected to the high vacuum evaporation chamber, and the sample vacuum transfer is achieved through the transition chamber to avoid exposure to the atmosphere.

Humanized and Safe Design 

Customized layout: Optimize the size and workstation arrangement based on the user's workshop space and process flow. 

Explosion-proof viewing window, emergency pressure relief valve, gas leakage monitoring, in compliance with CE/ISO safety standards.